1. Cycle time simulation study for cluster tool operation in IC fabrication. (22nd February 2012) Authors: Gupta, Amit Kumar; Sivakumar, Appa Iyer; Lendermann, Peter Journal: International journal of manufacturing technology and management Issue: Volume 23:Number 3/4(2011) Page Start: 179 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗