1. A concave-patterned TiN/PECVD-Si3N4 /TiN diaphragm MEMS acoustic sensor based on a polyimide sacrificial layer. (9th November 2015) Authors: Lee, Jaewoo; Jeon, J H; Je, C H; Kim, Y-G; Lee, S Q; Yang, W S; Lee, J S; Lee, S-G Journal: Journal of micromechanics and microengineering Issue: Volume 25:Number 12(2015:Dec.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗