1. Removal behavior of micropipe in 4H-SiC during micromachining. (August 2021) Authors: Huang, Yuhua; Wang, Miaocao; Li, Jinming; Zhu, Fulong Journal: Journal of manufacturing processes Issue: Volume 68:Part A(2021) Page Start: 888 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗