1. Silicon doped by molecular doping technique: Role of the surface layers of doped Si on the electrical characteristics. (February 2016) Authors: Caccamo, Sebastiano; Puglisi, Rosaria A.; Di Franco, Salvatore; D'Urso, Luisa; Indelicato, Valeria; Italia, Markus; Pannitteri, Salvatore; La Magna, Antonino Journal: Materials science in semiconductor processing Issue: Volume 42:Part 2(2016:Feb.) Page Start: 200 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗