1. Surface acoustic wave pressure sensor on ScAlN/3C-SiC/Si layer structure incorporating biomimetic microcantilever: modelling and performance enhancement. (9th December 2020) Authors: Zhang, Qiaozhen; Zhao, Xiangyong; Wang, Feifei; Luo, Yang; Mao, Hongwei; Han, Tao Journal: Smart materials and structures Issue: Volume 30:Number 1(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗