1. A simple fabrication process for SiNx/SiO2 waveguide based on sidewall oxidation of patterned silicon substrate. Issue 3 (4th February 2017) Authors: Wang, Ya'nan; Luo, Yi; Xiong, Bing; Sun, Changzheng; Wang, Jian; Hao, Zhibiao; Han, Yanjun; Wang, Lai; Li, Hongtao Journal: Journal of modern optics Issue: Volume 64:Issue 3(2017) Page Start: 226 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗