1. Image-Based Parametric Pattern Recognition for Micro- and Nano- Defect Detection. Issue 2 (2020) Authors: Belikov, Sergey; Su, Chanmin; Enachescu, Marian Journal: IFAC-PapersOnLine Issue: Volume 53:Issue 2(2020) Page Start: 8591 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗