1. A novel nanoprobing analysis flow by using multi-probe configuration to localize silicide defect in MOSFET. (November 2022) Authors: Zheng, Shijun; Yang, Jianli; Tian, Li; Che, Yi; Zhai, Lin Journal: Microelectronics and reliability Issue: Volume 138(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗