1. Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time. (January 2015) Authors: Paskaleva, A.; Weinreich, W.; Bauer, A.J.; Lemberger, M.; Frey, L. Journal: Materials science in semiconductor processing Issue: Volume 29(2015:Jan.) Page Start: 124 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗