1. Millipixel image correlation for sub nm measurement of MEMS motion. (19th September 2019) Authors: Adderson, Ryan; Hubbard, Ted Journal: Journal of micromechanics and microengineering Issue: Volume 29:Number 11(2019:Nov.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗