Subject: Junction -- Boron -- Diffusion -- Spacer -- Hydrogen - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Subject Junction -- Boron -- Diffusion -- Spacer -- Hydrogen

1. Modeling boron dose loss in sidewall spacer stacks of complementary metal oxide semiconductor transistors. (December 2016)

Authors:: Essa, Z.; Pelletier, B.; Morin, P.; Boulenc, P.; Pakfar, A.; Tavernier, C.; Wacquant, F.; Zechner, C.; Juhel, M.; Autran, J.L.; Cristiano, F.
Journal:: Solid-state electronics
Issue:: Volume 126(2016)
Page Start:: 163
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Modeling boron dose loss in sidewall spacer stacks of complementary metal oxide semiconductor transistors. (December 2016)

Authors:: Essa, Z.; Pelletier, B.; Morin, P.; Boulenc, P.; Pakfar, A.; Tavernier, C.; Wacquant, F.; Zechner, C.; Juhel, M.; Autran, J.L.; Cristiano, F.
Journal:: Solid-state electronics
Issue:: Volume 126(2016)
Page Start:: 163
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗