1. Effect of Pad Surface Micro-Texture on Removal Rate during Tungsten Chemical Mechanical Planarization. (1st January 2016) Authors: Mu, Yan; Han, Rouchen; Sampurno, Yasa; Zhuang, Yun; Philipossian, Ara Journal: ECS journal of solid state science and technology Issue: Volume 5:Number 6(2016) Page Start: P345 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Effect of Pad Surface Micro-Texture on Removal Rate during Tungsten Chemical Mechanical Planarization. (23rd April 2016) Authors: Mu, Yan; Han, Rouchen; Sampurno, Yasa; Zhuang, Yun; Philipossian, Ara Journal: ECS journal of solid state science and technology Issue: Volume 5:Number 6(2016) Page Start: P345 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗