1. An embedded capacitive sensor for in-situ angular detection of micromotor. (August 2021) Authors: Yang, Tianyu; Li, Xiaoshi; Sun, Xiangyu; Wang, Yicheng; Chen, Yu; Gong, Dongdong; Du, Yijia Journal: Microelectronics journal Issue: Volume 114(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗