1. Mean Residence Time and Dispersion Number Associated with Slurry Injection Methods in Chemical Mechanical Planarization. (1st January 2016) Authors: Mu, Yan; Han, Rouchen; Sampurno, Yasa; Zhuang, Yun; Borucki, Leonard; Philipossian, Ara Journal: ECS journal of solid state science and technology Issue: Volume 5:Number 3(2016) Page Start: P155 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Mean Residence Time and Dispersion Number Associated with Slurry Injection Methods in Chemical Mechanical Planarization. (31st December 2015) Authors: Mu, Yan; Han, Rouchen; Sampurno, Yasa; Zhuang, Yun; Borucki, Leonard; Philipossian, Ara Journal: ECS journal of solid state science and technology Issue: Volume 5:Number 3(2016) Page Start: P155 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗