1. A pre-dispatching vehicle method for a diffusion area in a 300 mm wafer fab. (16th November 2016) Authors: Huang, Chih-Wei; Lin, James T. Journal: Journal of industrial and production engineering Issue: Volume 33:Number 8(2016) Page Start: 579 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗