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Subject 2D materials -- atomic layer deposition -- MoS2 -- thin films

1. Atomic Layer Deposition of Crystalline MoS2 Thin Films: New Molybdenum Precursor for Low‐Temperature Film Growth. Issue 18 (30th March 2017)

Authors:
Mattinen, Miika; Hatanpää, Timo; Sarnet, Tiina; Mizohata, Kenichiro; Meinander, Kristoffer; King, Peter J.; Khriachtchev, Leonid; Räisänen, Jyrki; Ritala, Mikko; Leskelä, Markku
Journal:
Advanced materials interfaces
Issue:
Volume 4:Issue 18(2017)
Page Start:
n/a
Record Type:
Journal Article
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