1. MEMS‐based piezoelectric BAW resonator based on out‐of‐plane degenerate mode for micro angular detector. Issue 6 (1st March 2013) Authors: Cheng, Y.X.; Zhang, W.P.; Guan, R.; Zhang, G.; Xu, Z.X.; Chen, W.Y. Journal: Electronics letters Issue: Volume 49:Issue 6(2013) Page Start: 406 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗