1. A comparative study of selective dry and wet etching of germanium–tin (Ge1−xSnx) on germanium. (12th July 2018) Authors: Han, Yi; Li, Yaoyao; Song, Yuxin; Chi, Chaodan; Zhang, Zhenpu; Liu, Juanjuan; Zhu, Zhongyunsheng; Wang, Shumin Journal: Semiconductor science and technology Issue: Volume 33:Number 8(2018:Aug.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗