1. Surface analysis in the semiconductor industry: Present use and future possibilities. (1st April 2020) Authors: van der Heide, Paul A.W.; Spampinato, Valentina; Franquet, Alexis; Zborowski, Charlotte; Conard, Thierry; Ludwig, Jonathan; Paredis, Kristof; Vandervorst, Wilfried; Pirkl, Alexander; Niehuis, Ewald Other Names: Oswald Steffen guestEditor.; Watts John F. guestEditor.; Abel Marie‐Laure guestEditor. Journal: Surface and interface analysis Issue: Volume 52:Number 12(2020) Page Start: 786 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗