1. Plasma-Enhanced Atmospheric-Pressure Spatial ALD of Al2O3 and ZrO2. (16th August 2016) Authors: Creyghton, Yves; Illiberi, A.; Mione, A.; van Boekel, W.; Debernardi, N.; Seitz, M; van den Bruele, Fieke; Poodt, P.; Roozeboom, Fred Journal: ECS transactions Issue: Volume 75:Number 6(2016) Page Start: 11 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗