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You searched for: Author/Creator Zahedinejad, Mohammad- Zahedinejad, Mohammad [remove] 3
- Nanotechnology -- Periodicals 2
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- Si -- etching parameters -- dry etching -- micrometre‐sized silicon structures -- deep vertical structures -- hydrofluoric acid solutions -- hydrogen peroxide -- deep‐etched silicon structures -- metal‐assisted chemical etching process -- deep silicon microstructures 1