1. Wafer level fabrication of single cell dispenser chips with integrated electrodes for particle detection. (22nd January 2015) Authors: Schoendube, Jonas; Yusof, Azmi; Kalkandjiev, Kiril; Zengerle, Roland; Koltay, Peter Journal: Journal of micromechanics and microengineering Issue: Volume 25:Number 2(2015:Feb.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗