1. The properties of Cu films deposited by high rate magnetron sputtering from a liquid target. (November 2019) Authors: Bleykher, G.A.; Yuryeva, A.V.; Shabunin, A.S.; Sidelev, D.V.; Grudinin, V.A.; Yuryev, Yu.N. Journal: Vacuum Issue: Volume 169(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗