1. Design and fabrication of AlN-on-Si chirped surface acoustic wave resonators for label-free cell detection. (September 2019) Authors: Syamsu, I; Granz, T; Scholz, G; Mariana, S; Yulianto, N; Daul, L; Koenders, L; Triyana, K; Daniel Prades, J; Peiner, E; Waag, A; Wasisto, H S Journal: Journal of physics Issue: Volume 1319(2019) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗