1. Analysis technique for ultra shallow junction using medium energy ion scattering time‐of‐flight elastic recoil detection analysis. (11th June 2014) Authors: Abo, Satoshi; Pei, Ri; Yuan, Yao Xin; Wakaya, Fujio; Takai, Mikio; Yurimoto, Hisayoshi Journal: Surface and interface analysis Issue: Volume 46:Number 12/13(2014) Page Start: 1192 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗