Author/Creator: Yuan, Song / Journal: Materials science in semiconductor processing - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Yuan, Song Journal Materials science in semiconductor processing

1. Atomistic understanding of the subsurface damage mechanism of silicon (100) during the secondary nano-scratching processing. (15th June 2022)

Authors:: Yuan, Song; Guo, Xiaoguang; Liu, Shengtong; Li, Penghui; Liu, Fumin; Zhang, Lemin; Kang, Renke
Journal:: Materials science in semiconductor processing
Issue:: Volume 144(2022)
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Record Type:: Journal Article
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2. Effect of grinding damage on cutting force and ductile machining during single grain scratching of monocrystalline silicon. (15th November 2022)

Authors:: Li, Ming; Guo, Xiaoguang; Dai, Siyang; Yuan, Song; Ma, Jianli; Liu, Fumin; Zhang, Lemin; Guo, Dongming; Zhou, Ping
Journal:: Materials science in semiconductor processing
Issue:: Volume 151(2022)
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Record Type:: Journal Article
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3. Study on subsurface damage mechanism of gallium nitride in nano-grinding. (15th June 2021)

Authors:: Zhang, Chaoyue; Dong, Zhigang; Yuan, Song; Guo, Xiaoguang; Kang, Renke; Guo, Dongming
Journal:: Materials science in semiconductor processing
Issue:: Volume 128(2021)
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Record Type:: Journal Article
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