11. Self-consistent simulation of the impedance matching network for single frequency capacitively coupled plasma. (21st January 2022) Authors: Gao, Jiamao; Yu, Shimin; Wu, Hao; Wang, Yu; Wang, Zhijiang; Pan, Yuan; Jiang, Wei; Zhang, Ya Journal: Journal of physics Issue: Volume 55:Number 16(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗