1. Imapct of selective thermal etching in mixed H2/NH3 atmosphere on crystal quality of AlGaN/GaN heterostructures. (18th February 2021) Authors: Yoshiya, Yuki; Hoshi, Takuya; Sugiyama, Hiroki; Matsuzaki, Hideaki Journal: Japanese journal of applied physics Issue: Volume 60:Number SB(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Impact of selective thermal etching in mixed H2/NH3 atmosphere on crystal quality of AlGaN/GaN heterostructures. (18th February 2021) Authors: Yoshiya, Yuki; Hoshi, Takuya; Sugiyama, Hiroki; Matsuzaki, Hideaki Journal: Japanese journal of applied physics Issue: Volume 60:Number SB(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗