1. AlN/AlGaN/GaN buffer optimization on silicon (111): bow and crystal quality control for Si‐CMOS fabs. Issue 3 (17th February 2014) Authors: Kandaswamy, Prem Kumar; Liang, Hu; Zhao, Ming; Yoga, Saripalli; Carlson, Eric Porter; Thapa, Sarad Bahadur; Hove, Marleen Van; Richard, Olivier; DeVos, Brecht; Vancoille, Eric; Dutta, Barun Other Names: Eddy, Jr. Charles R. "Chip" sponsoringEditor.; Kuball Martin sponsoringEditor.; Koleske Daniel D. sponsoringEditor.; Amano Hiroshi sponsoringEditor. Journal: Physica status solidi Issue: Volume 11:Issue 3/4(2014:Apr.) Page Start: 450 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗