1. Etch Defect Characterization and Reduction in Hard-Mask-Based Al Interconnect Etching. (23rd September 2008) Authors: Lee, Hong-Ji; Hung, Che-Lun; Leng, Chia-Hao; Lian, Nan-Tzu; Young, Ling-Wu; Yang, Tahone; Chen, Kuang-Chao; Lu, Chih-Yuan Other Names: Wu Jong-Shinn Academic Editor. Journal: International journal of plasma science and engineering Issue: Volume 2008(2008) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Etch Defect Characterization and Reduction in Hard-Mask-Based Al Interconnect Etching. (7th September 2008) Authors: Lee, Hong-Ji; Hung, Che-Lun; Leng, Chia-Hao; Lian, Nan-Tzu; Young, Ling-Wu; Yang, Tahone; Chen, Kuang-Chao; Lu, Chih-Yuan Other Names: Wu Jong-Shinn Academic Editor. Journal: International journal of plasma science and engineering Issue: Volume 2008(2008) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Improvement of cell reliability by floating gate implantation on 1Xnm NAND flash memory. (August 2018) Authors: Liao, Jeng-Hwa; Ko, Zong-Jie; Lin, Yu-Min; Lin, Hsing-Ju; Hsieh, Jung-Yu; Yang, Ling-Wu; Yang, Tahone; Chen, Kuang-Chao; Lu, Chih-Yuan Journal: Solid-state electronics Issue: Volume 146(2018) Page Start: 39 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Properties of N-rich Silicon Nitride Film Deposited by Plasma-Enhanced Atomic Layer Deposition. (July 2017) Authors: Jhang, Pei-Ci; Lu, Chi-Pin; Shieh, Jung-Yu; Yang, Ling-Wu; Yang, Tahone; Chen, Kuang-Chao; Lu, Chih-Yuan Journal: Solid-state electronics Issue: Volume 133(2017) Page Start: 10 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. PMOS junction optimization for 3D NAND FLASH memory with CMOS under array. (April 2023) Authors: Liao, Jeng-Hwa; Ko, Zong-Jie; Lin, Hsing-Ju; Hsieh, Jung-Yu; Yang, Ling-Wu; Yang, Tahone; Chen, Kuang-Chao; Lu, Chih-Yuan Journal: Solid-state electronics Issue: Volume 202(2023) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗