1. Improved passivation depth of porous fluorescent 6H-SiC with Si/C faces using atomic layer deposition. (1st March 2022) Authors: Yanai, Kosuke; Lu, Weifang; Yamane, Yoma; Kodera, Keita; Ou, Yiyu; Ou, Haiyan; Kamiyama, Satoshi; Takeuchi, Tetsuya; Iwaya, Motoaki; Akasaki, Isamu Journal: Japanese journal of applied physics Issue: Volume 61:Number 3(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗