1. Deposition of intrinsic hydrogenated amorphous silicon for thin‐film solar cells – a comparative study for layers grown statically by RF‐PECVD and dynamically by VHF‐PECVD. (31st July 2012) Authors: Zimmermann, T.; Flikweert, A. J.; Merdzhanova, T.; Woerdenweber, J.; Gordijn, A.; Rau, U.; Stahr, F.; Dybek, K.; Bartha, J. W. Journal: Progress in photovoltaics Issue: Volume 22:Number 2(2014) Page Start: 198 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗