Author/Creator: Widrig, Beno - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Widrig, Beno

1. Silicon etch with chromium ions generated by a filtered or non-filtered cathodic arc discharge. Issue 1 (1st December 2016)

Authors:: Scopece, Daniele; Döbeli, Max; Passerone, Daniele; Maeder, Xavier; Neels, Antonia; Widrig, Beno; Dommann, Alex; Müller, Ulrich; Ramm, Jürgen
Journal:: Science and technology of advanced materials
Issue:: Volume 17:Issue 1(2016)
Page Start:: 20
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Silicon etch with chromium ions generated by a filtered or non-filtered cathodic arc discharge. Issue 1 (1st January 2016)

Authors:: Scopece, Daniele; Döbeli, Max; Passerone, Daniele; Maeder, Xavier; Neels, Antonia; Widrig, Beno; Dommann, Alex; Müller, Ulrich; Ramm, Jürgen
Journal:: Science and technology of advanced materials
Issue:: Volume 17:Issue 1(2016)
Page Start:: 20
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗