Author/Creator: Wang, Qinwei - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Wang, Qinwei

1. Controlling of Ru/Cu Removal Rate Selectivity during CMP by Using Ammonium Sulfate and Inhibitor. (1st January 2019)

Authors:: Wang, Ziyan; Zhou, Jianwei; Wang, Chenwei; Zhang, Jiajie; Wang, Qinwei; Zhang, Xue; Wang, Chao
Journal:: ECS journal of solid state science and technology
Issue:: Volume 8:Number 9(2019)
Page Start:: P509
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

2. Controlling of Ru/Cu Removal Rate Selectivity during CMP by Using Ammonium Sulfate and Inhibitor. (27th August 2019)

Authors:: Wang, Ziyan; Zhou, Jianwei; Wang, Chenwei; Zhang, Jiajie; Wang, Qinwei; Zhang, Xue; Wang, Chao
Journal:: ECS journal of solid state science and technology
Issue:: Volume 8:Number 9(2019)
Page Start:: P509
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

3. Role of Ammonium Ions in Colloidal Silica Slurries for Ru CMP. (14th May 2019)

Authors:: Wang, Ziyan; Zhou, Jianwei; Wang, Chenwei; Zhang, Jiajie; Wang, Qinwei; Wang, Ru
Journal:: ECS journal of solid state science and technology
Issue:: Volume 8:Number 4(2019)
Page Start:: P285
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗

4. Role of Ammonium Ions in Colloidal Silica Slurries for Ru CMP. (1st January 2019)

Authors:: Wang, Ziyan; Zhou, Jianwei; Wang, Chenwei; Zhang, Jiajie; Wang, Qinwei; Wang, Ru
Journal:: ECS journal of solid state science and technology
Issue:: Volume 8:Number 4(2019)
Page Start:: P285
Record Type:: Journal Article
View Content:: Available online (eLD content is only available in our Reading Rooms) ↗