1. Advanced Carriers on Legacy CMP Tools - an Intelligent Solution for Flexible Production Environments and R&D Labs. (28th July 2016) Authors: Franz, Mathias; Schubert, Ina; Junghans, Romy; Martinka, Ronny; Rudolph, Catharina; Wachsmuth, Holger; Trojan, Dan; VanDevender, Barrie; Wrschka, Peter; Gottfried, Knut Christoph Journal: ECS transactions Issue: Volume 72:Number 18(2016) Page Start: 17 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗