1. Formation of Ultra-Thin Pore Seal Layer on Porous Low-k Films. Issue 1791 (2015) Authors: Ono, Shoko S.; Kayaba, Yasuhisa; Tanaka, Hirofumi; Wachi, Hiroko; Inoue, Koji Editors: Kondoh, E.; Baklanov, M.; Bielefeld, J.D.; Jousseaume, V. Journal: MRS proceedings Issue: Issue 1791(2015) Page Start: 7 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗