1. On the Fabrication of Backside Illuminated Image Sensors: Bonding Oxide, Edge Trimming and CMP Rework Routes. (7th April 2015) Authors: Cavaco, Celso; Peng, Lan; Sebaai, Farid; Verbinnen, Greet; Visker, Jakob; Olmen, Jan; Tezcan, Deniz Sabuncuoglu; Osman, Haris Journal: ECS transactions Issue: Volume 64:Number 40(2014) Page Start: 123 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗