1. Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten. (1st January 2016) Authors: Xu, Kun; Shen, Shih-Haur; Fung, Jason; Iravani, Hassan; Carlsson, Ingemar; Liu, Tzu-Yu; Swedek, Bogdan; Chang, Shou-Sung; Tu, Wen-chiang; Kitajima, Tomohiko; Mikhaylich, Katrina; Brown, Brian; Huey, Sidney; Redeker, Fritz Journal: ECS journal of solid state science and technology Issue: Volume 5:Number 6(2016) Page Start: P361 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Impact of Film Morphology on Chemical Mechanical Polishing of Tungsten. (29th April 2016) Authors: Xu, Kun; Shen, Shih-Haur; Fung, Jason; Iravani, Hassan; Carlsson, Ingemar; Liu, Tzu-Yu; Swedek, Bogdan; Chang, Shou-Sung; Tu, Wen-chiang; Kitajima, Tomohiko; Mikhaylich, Katrina; Brown, Brian; Huey, Sidney; Redeker, Fritz Journal: ECS journal of solid state science and technology Issue: Volume 5:Number 6(2016) Page Start: P361 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗