1. Pattern transferring of Prolift-100 polymer sacrificial layers with controlled sidewall profile. (14th May 2021) Authors: Silva, Jorge R; Kala, Hemendra; Tripathi, Dhirendra K; Papanastasiou, Kirsten; Silva, K K M B Dilusha; Putrino, Gino; Martyniuk, Mariusz; Keating, Adrian; Antoszewski, Jarek; Faraone, Lorenzo Journal: Journal of micromechanics and microengineering Issue: Volume 31:Number 7(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗