1. Cleaning of InGaAs and InP Layers for Nanoelectronics and Photonics Contact Technology Applications. (11th September 2015) Authors: Rodriguez, Philippe; Toselli, Laura; Ghegin, Elodie; Rebaud, Mickaël; Rochat, Névine; Chevalier, Nicolas; Martinez, Eugénie; Nemouchi, Fabrice Journal: ECS transactions Issue: Volume 69:Number 8(2015) Page Start: 251 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗