1. Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources. (9th November 2015) Authors: Tomita, Kentaro; Sato, Yuta; Nishikawa, Kazutaka; Uchino, Kiichiro; Yanagida, Tatsuya; Tomuro, Hiroaki; Wada, Yasunori; Kunishima, Masahito; Kodama, Takeshi; Mizoguchi, Hakaru; Sunahara, Atsushi Journal: Applied physics express Issue: Volume 8:Number 12(2015:Dec.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Feasibility study on reactive ion etching occurrence in EUV-induced photoionized hydrogen plasmas based on electron temperature and electron density measurements. (1st May 2022) Authors: Kouge, Kouichiro; Tomita, Kentaro; Hotta, Junya; Pan, Yiming; Tomuro, Hiroaki; Yanagida, Tatsuya; Uchino, Kiichiro; Yamamoto, Naoji Journal: Japanese journal of applied physics Issue: Volume 61:Number 5(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Spatial profiles of electron density, electron temperature, average ionic charge, and EUV emission of laser-produced Sn plasmas for EUV lithography. (31st January 2017) Authors: Sato, Yuta; Tomita, Kentaro; Tsukiyama, Syoichi; Eguchi, Toshiaki; Uchino, Kiichiro; Kouge, Kouichiro; Tomuro, Hiroaki; Yanagida, Tatsuya; Wada, Yasunori; Kunishima, Masahito; Kodama, Takeshi; Mizoguchi, Hakaru Journal: Japanese journal of applied physics Issue: Volume 56:Number 3(2017) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
4. Surface morphology change of protective film on collector mirror related to implantation of Sn emitted from laser produced plasma in EUV light source. (15th October 2020) Authors: Honda, Yoshiyuki; Yanagida, Tatsuya; Shiraishi, Yutaka; Morita, Masayuki; Andou, Masahiko; Tomuro, Hiroaki; Matsuda, Akifumi; Yoshimoto, Mamoru Journal: Applied physics express Issue: Volume 13:Number 11(2020) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
5. Time-resolved spatial profiles of electron density and temperature in hydrogen plasmas induced by radiation from laser-produced tin plasmas for extreme ultraviolet lithography light sources. (14th May 2021) Authors: Kouge, Kouichiro; Tomita, Kentaro; Hotta, Junya; Pan, Yiming; Tomuro, Hiroaki; Morita, Masayuki; Yanagida, Tatsuya; Uchino, Kiichiro; Yamamoto, Naoji Journal: Japanese journal of applied physics Issue: Volume 60:Number 6(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗