1. A power-density-enhanced MEMS electrostatic energy harvester with symmetrized high-aspect ratio comb electrodes. (12th June 2019) Authors: Honma, Hiroaki; Tohyama, Yukiya; Mitsuya, Hiroyuki; Hashiguchi, Gen; Fujita, Hiroyuki; Toshiyoshi, Hiroshi Journal: Journal of micromechanics and microengineering Issue: Volume 29:Number 8(2019:Aug.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. High-uniformity centimeter-wide Si etching method for MEMS devices with large opening elements. (7th March 2018) Authors: Okamoto, Yuki; Tohyama, Yukiya; Inagaki, Shunsuke; Takiguchi, Mikio; Ono, Tomoki; Lebrasseur, Eric; Mita, Yoshio Journal: Japanese journal of applied physics Issue: Volume 57:Number 4(2018)Supplement Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. Power enhancement of MEMS vibrational electrostatic energy harvester by stray capacitance reduction. (27th October 2021) Authors: Honma, Hiroaki; Tohyama, Yukiya; Mitsuya, Hiroyuki; Hashiguchi, Gen; Fujita, Hiroyuki; Toshiyoshi, Hiroshi Journal: Journal of micromechanics and microengineering Issue: Volume 31:Number 12(2021) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗