1. InOx Doped SnO2 Nanostructure Deposited on MEMS Device by PE-ALD Process for Detection of NO2. Issue 2 (1st February 2023) Authors: Shi, Zhong-Hong; Hsiao, Yu-Jen; Wang, Sheng-Chang; Tien, Wei-Chen Journal: Journal of the Electrochemical Society Issue: Volume 170:Issue 2(2023) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗