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You searched for: Author/Creator Telgenhoff, Michael

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1. CGA G-13 large-scale silane release test – Part II. Unconfined silane–air explosions. (July 2015)

2. CGA G-13 large-scale silane release tests – Part I. Silane jet flame impingement tests and thermal radiation measurement. (July 2015)

3. Hollow Cathode Plasma (HCP) Enhanced Atomic Layer Deposition of Silicon Nitride (SiNx) Thin Films Using Pentachlorodisilane (PCDS). (23rd April 2019)