1. 3D micro- and nano-machining of hydrogenated amorphous silicon films on SiO2/Si and glass substrates. (3rd June 2015) Authors: Soleimani-Amiri, S; Zanganeh, S; Ramzani, R; Talei, R; Mohajerzadeh, S; Azimi, S; Sanaee, Z Journal: Journal of micromechanics and microengineering Issue: Volume 25:Number 7(2015:Jul.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗