1. Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors. (6th May 2022) Authors: Taj, Mohammad; Pitchaiah, Telagathoti; Sasikumar, Bashyam Other Names: Chelladurai Samson Jerold Samuel Academic Editor. Journal: Advances in materials science and engineering Issue: Volume 2022(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗