1. Modified TMAH based etchant for improved etching characteristics on Si{1 0 0} wafer. (27th June 2017) Authors: Swarnalatha, V; Narasimha Rao, A V; Ashok, A; Singh, S S; Pal, P Journal: Journal of micromechanics and microengineering Issue: Volume 27:Number 8(2017:Aug.) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Wet bulk micromachining characteristics of Si{110} in NaOH-based solution. (1st December 2022) Authors: Purohit, S; Swarnalatha, V; Pandey, A K; Sharma, R K; Pal, P Journal: Journal of micromechanics and microengineering Issue: Volume 32:Number 12(2022) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗