Author/Creator: Sushkov, Vladimir - British Library Electronic Legal Deposit Catalogue-Journal Issues and Articles Search Results

Author/Creator Sushkov, Vladimir

1. A plasma chemistry model for H2/SiH4 mixtures used in PECVD processes. (1st May 2023)

Authors:: Sushkov, Vladimir; Rachdi, Lazhar; Hofmann, Marc
Journal:: Physica scripta
Issue:: Volume 98:Number 5(2023)
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Record Type:: Journal Article
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2. Metastable argon atom density in complex argon/acetylene plasmas determined by means of optical absorption and emission spectroscopy. (20th September 2016)

Authors:: Sushkov, Vladimir; Herrendorf, Ann-Pierra; Hippler, Rainer
Journal:: Journal of physics
Issue:: Volume 49:Number 42(2016)
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Record Type:: Journal Article
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