1. Material and optical properties of low-temperature NH3-free PECVD SiNx layers for photonic applications. (1st December 2016) Authors: Domínguez Bucio, Thalía; Khokhar, Ali Z; Lacava, Cosimo; Stankovic, Stevan; Mashanovich, Goran Z; Petropoulos, Periklis; Gardes, Frederic Y Journal: Journal of physics Issue: Volume 50:Number 2(2017) Page Start: Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗