1. Erosion behavior of Y2O3 in fluorine‐based etching plasmas: Orientation dependency and reaction layer formation. Issue 3 (26th November 2020) Authors: Kindelmann, Moritz; Stamminger, Mark; Schön, Nino; Rasinski, Marcin; Eichel, Rüdiger‐A.; Hausen, Florian; Bram, Martin; Guillon, Olivier Journal: Journal of the American Ceramic Society Issue: Volume 104:Issue 3(2021) Page Start: 1465 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
2. Processing map to control the erosion of Y2O3 in fluorine based etching plasmas. Issue 5 (15th January 2022) Authors: Kindelmann, Moritz; Weber, Moritz L(ukas); Stamminger, Mark; Buschhaus, Rahel; Breuer, Uwe; Bram, Martin; Guillon, Olivier Journal: Journal of the American Ceramic Society Issue: Volume 105:Issue 5(2022) Page Start: 3498 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗
3. The role of fluorination during the physicochemical erosion of yttria in fluorine-based etching plasmas. Issue 2 (February 2022) Authors: Kindelmann, Moritz; Weber, Moritz L.; Stamminger, Mark; Buschhaus, Rahel; Wessel, Egbert; Bram, Martin; Guillon, Olivier Journal: Journal of the European Ceramic Society Issue: Volume 42:Issue 2(2022) Page Start: 561 Record Type: Journal Article View Content: Available online (eLD content is only available in our Reading Rooms) ↗